Illuminating arrangement including a zoom objective incorporatin

Details Illuminating arrangement including a zoom objective incorporatin Illuminating arrangement including a zoom objective incorporatin

1995-06-15

1997-10-07

Grimley, Arthur T.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355 71, G03B 2754, G03B 2772

Patent

active

056754019

ABSTRACT:
An illumination system for an optical system such as a microlithographic projection exposure system includes a zoom lens 2 for varying the degree of coherence .sigma. and two axicons (22, 23) with an adjustable distance therebetween. The distance can preferably be reduced to zero. The illumination system provides continuous, conventional illumination with a variable degree of coherence .sigma. and annular illumination or multipole illumination with different geometries with low losses of light.

REFERENCES:
patent: 5208629 (1993-05-01), Matsuo et al.
patent: 5237367 (1993-08-01), Kudo
patent: 5245384 (1993-09-01), Mori
patent: 5343489 (1994-08-01), Wangler
patent: 5345292 (1994-09-01), Shiozawa et al.
patent: 5357312 (1994-10-01), Tounai
patent: 5452054 (1995-09-01), Dewa et al.
"Depth of Focus and Resolution Enhancement for i-line and deep-UV Lithography Using Annular Illumination" by W. Partlo et al, SPIE, vol. 1927, Optical/Laser Microlithography VI (1993), pp. 137 to 157.

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