Illuminating arrangement for an optical system having a reticle

Details Illuminating arrangement for an optical system having a reticle Illuminating arrangement for an optical system having a reticle

1994-12-08

1997-07-08

Grimley, Arthur T.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 70, 355 71, 359569, G03F 720, G02B 1900

Patent

active

056467150

ABSTRACT:
The invention is directed to an illuminating arrangement for an optical system such as a microlithographic projection exposure apparatus and includes a glass rod 5 for light integration. The reticle masking unit (REMA) 51 is mounted at the exit face of the glass rod 5.

REFERENCES:
patent: 2708388 (1955-07-01), Capstaff
patent: 4988188 (1991-01-01), Ohta
patent: 5357312 (1994-10-01), Tounai
patent: 5359388 (1994-10-01), Hollman
patent: 5379090 (1995-01-01), Shiraishi
Rudolf Kingslake, Optical System Design, Academic Press, 1983, pp. 277-281 and 243-244.

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