Illuminating apparatus and projection exposure apparatus provide

Details Illuminating apparatus and projection exposure apparatus provide Illuminating apparatus and projection exposure apparatus provide

1993-01-22

1994-03-22

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, G03B 2742, G03B 2754

Patent

active

052968928

ABSTRACT:
An illuminating apparatus comprises a first optical integrator and a second optical integrator which are replaceably arranged. The second optical integrator is structured to provide substantially the same number of secondary light sources as the first optical integrator but with the different size of surface light source formed by these second light sources. Further, the structure is arranged so that it has an aperture number on the emission side, which is equal to the aperture number of the first optical integrator on its emission side. Hence, the illuminance evenness is not degraded even when the .sigma. value is significantly varied.

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