Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate
2006-04-18
2006-04-18
Wells, Nikita (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
With detector
C250S399000, C250S492200
Reexamination Certificate
active
07030388
ABSTRACT:
The present invention relates to an illuminant, etc., having a high response speed and a high luminous intensity. The illuminant comprises a substrate and a nitride semiconductor layer provided on one surface of the substrate. The nitride semiconductor layer emits fluorescence in response to incidence of electrons. At least part of the emitted fluorescence passes through the substrate, and then exits from the other surface of the substrate. Generation of the fluorescence is caused by incidence of electrons onto a quantum well structure of the nitride semiconductor layer and recombination of pairs of electrons and holes generated due to electron incidence, and the response speed of fluorescence generation is on the order of nanoseconds or less. Also, the luminous intensity of the fluorescence becomes equivalent to that of a conventional P47 fluorescent substance. Namely, the illuminant has a response speed and a luminous intensity that are sufficient for adaptation to scanning electron microscopes and mass spectroscopes.
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Kondo Minoru
Mizuno Itaru
Niigaki Minoru
Takagi Yasufumi
Uchiyama Shoichi
Drinker Biddle & Reath LLP
Hamamatsu Photonics K.K.
Quash Anthony
Wells Nikita
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