Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2008-05-27
2008-05-27
San Martin, Jaydi A (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S324000, C310S363000, C310S364000, C310S365000, C310S31300R
Reexamination Certificate
active
10996604
ABSTRACT:
The disclosed invention relates to achieving micromachined piezoelectrically-actuated diaphragms. The piezoelectric diaphragm includes a central, inactive electrode free region and an annular shaped interdigitated electrode adjacent to the outer periphery of the central region. The diaphragm also may have an inactive annular, electrode free region and an active central, interdigitated electrode region. The diaphragms may be used in, such as, miniature pumps. The pumps may include a plurality of chambers to generate peristaltic pumping of fluids.
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Freidhoff Carl Baldwin
Hong Euniki
Krishnaswamy Silai V
McKinstry Susan Trolier
Law Offices of John A. Parrish
Martin Jaydi A San
Northrup Grumman Corp.
The Penn State Research Foundation
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