Identifying manufacturing disturbances using preliminary...

Details Identifying manufacturing disturbances using preliminary... Identifying manufacturing disturbances using preliminary...

2011-03-15

2011-03-15

Wachsman, Hal D (Department: 2857)

Data processing: measuring, calibrating, or testing

Testing system

Of circuit

C702S118000, C702S120000, C700S121000, C438S014000, C438S017000

Reexamination Certificate

active

07908109

ABSTRACT:
A method includes receiving measured values for a plurality of electrical test parameters associated with integrated circuit devices on at least one wafer measured prior to completion of the wafer. Values of the electrical test parameters are predicted. The measured values are compared to the predicted values to generate residual values associated with the electrical test parameters. At least one performance metric associated with the devices is generated based on the residual values.

REFERENCES:
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patent: 7062415 (2006-06-01), Whitefield et al.
patent: 7339388 (2008-03-01), Aghababazadeh et al.
patent: 2004/0040001 (2004-02-01), Miller et al.
patent: 2004/0093107 (2004-05-01), Good et al.
patent: 2006/0167651 (2006-07-01), Zangooie et al.

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