ICP mass spectrometer

Details ICP mass spectrometer ICP mass spectrometer

1986-07-17

1988-04-26

Anderson, Bruce C.

Radiant energy

Ionic separation or analysis

With sample supply means

250289, B01D 5944

Patent

active

047406968

ABSTRACT:
An apparatus for mass-analyzing ions contained in plasma. A first vacuum chamber is maintained in a relatively low vacuum state and has a first aperture disposed adjacent to a plasma source for admitting therethrough the plasma into the first vacuum chamber. A second vacuum chamber is maintained in a relatively medium vacuum state and has a second aperture communicating between the first and second vacuum chambers. An ion extracting electrode is disposed in the second vacuum chamber for extracting ions contained in the plasma through the second aperture to form an ion stream composed of the extracted ions. A third vacuum chamber is maintained in a relatively high vacuum state and has a third aperture communicating between the second and third vacuum chambers. An ion focusing electrode is disposed in the third vacuum chamber for focusing the ion stream passing through the third aperture, and a mass spectrometer is disposed in the third vacuum chamber to receive the focused ion stream for analyzing the ions in the focused ion stream.

REFERENCES:
patent: 4144451 (1979-03-01), Kambara
patent: 4300044 (1981-11-01), Iribanne et al.
patent: 4501965 (1985-02-01), Douglas
patent: 4682026 (1987-07-01), Douglas

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