Ice particle forming and blasting device

Details Ice particle forming and blasting device Ice particle forming and blasting device

1989-11-09

1990-12-04

Rose, Robert A.

Abrasive tool making process, material, or composition

With carbohydrate or reaction product thereof

51419, 51320, 261124, 134 7, B24C 322, B24C 318, B24C 100, B08B 700

Patent

active

049743759

ABSTRACT:
A solid surface cleaning device utilizes a jet of ice particles of ultrapure water for removing contaminants from a surface of a solid such as a semiconductor wafer. The electrical resistivity of ultrapure water stored in a tank is reduced by means of a gas such as dry air or carbon dioxide evolving into the water from a bubble tube disposed in the tank. The water whose resistivity is thus reduced is sprayed from a nozzle into an ice-making container which is refrigerated by the vaporization of a refrigerant discharged into the container. The fine ice particles that are thus generated in the container are sprayed and blasted from a jet spray nozzle onto the surface of the cleaned solid supported within a jet spray chamber. The air inside the chamber is exhausted by a blower together with the ice particles that have been ejected from the jet spray nozzle.

REFERENCES:
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patent: 4655847 (1987-04-01), Ichinoseki et al.
patent: 4731125 (1988-03-01), Carr
patent: 4806171 (1989-02-01), Whitlock et al.
patent: 4869090 (1989-09-01), Tada et al.

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