ICB method of forming high refractive index films

Details ICB method of forming high refractive index films ICB method of forming high refractive index films

1998-04-16

2000-02-08

King, Roy V.

Coating processes

Direct application of electrical, magnetic, wave, or...

Pretreatment of coating supply or source outside of primary...

427529, 4271264, 427109, 427166, C23C 1432

Patent

active

06022598&

ABSTRACT:
A uniform film of sapphire and tungsten is deposited onto a surface of a substrate using the ionized cluster beam ("ICB") apparatus. During ICB deposition, a tungsten crucible containing sapphire is heated until a vapor of sapphire and tungsten is formed. The tungsten crucible is heated to form a tungsten vapor, which causes the crucible material to mix with the sapphire, thereby forming a vapor mixture of sapphire and tungsten. The vapor is ejected through a small nozzle into a vacuum region. The resulting adiabatic expansion of the vapor promotes formation of atomic clusters. Some of the clusters are ionized, and electrons are stripped off the clusters. The clusters are accelerated toward the substrate, which is also within the vacuum region. The clusters impact the surface of the substrate, where they are deposited to form the uniform sapphire/tungsten film. The film is deposited in an sapphire (aluminum oxide)/tungsten ratio of 2:1. The film has a relatively high index of refraction of approximately 2.2, thereby rendering it useful as an optical coating (specifically, an electrochromic material). The film may also be used as a resistive or thermally conductive material.

REFERENCES:
patent: 4152478 (1979-05-01), Takagi
patent: 4217855 (1980-08-01), Takagi
patent: 4354909 (1982-10-01), Takagi et al.
patent: 4800100 (1989-01-01), Herbots et al.
patent: 4902572 (1990-02-01), Horne et al.
patent: 4944961 (1990-07-01), Lu et al.
patent: 5350607 (1994-09-01), Tyson et al.
patent: 5380683 (1995-01-01), Tyson et al.
patent: 5413820 (1995-05-01), Hayashi
patent: 5436035 (1995-07-01), Lohwasser
patent: 5525158 (1996-06-01), Tsukazaki et al.
patent: 5582879 (1996-12-01), Fujimura et al.
Hulya Demiryont, Electronics and Potential Automotive Applications, Optical Thin Films III: New Developments, 1990, SPIE vol. 1323 pp. 171-187.

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