IC processed piezoelectric microphone

Details IC processed piezoelectric microphone IC processed piezoelectric microphone

1987-11-25

1988-11-08

Ng, Jin F.

Electrical audio signal processing systems and devices

Electro-acoustic audio transducer

Microphone capsule only

29 2535, 181167, 310324, 381190, 381202, 381203, 427100, H04R 1700, H04R 704, H04R 1900

Patent

active

047838213

ABSTRACT:
A miniature diaphragm pressure transducer. A thin diaphragm of silicon nitride has an upper face covered by a zinc-oxide piezoelectric film encapsulated in chemical vapor deposited silicon dioxide. A series of annular, basically concentric, polysilicon electrodes are provided in the silicon dioxide between the piezoelectric film and the diaphragm and in contact with the piezoelectric film. A series of annular, basically concentric, aluminum electrodes are on the opposite side of the piezoelectric film from the polysilicon electrodes and are aligned with the polysilicon electrodes; they lie over the silicon dioxide, and are in contact with the piezoelectric film.

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patent: 3585415 (1971-06-01), Muller
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patent: 4665754 (1987-05-01), Glenn et al.
1978 Ultrasonics Symposium Proceedings, Cherry Hill, NJ, Sep. 1978, "Zinc Oxide Transducer Arrays for Integrated Optics" Mergerian, D. et al. pp. 64-69.
Applied Physics Letters, Grudkowski T. W. "Fundamental-Mode VHF/UHF Miniature Acoustic Resonators and Filters on Silicon", Dec. 1, 1980, pp. 993-995.
Electronics/Apr. 28, 1986 Micromachining Etches a Microphone On a Chip John Gosch Darmstadt, West Germany.
Sensors and Actuators, 4(1983) 357-362 ZnO on Si Integrated Acoustic Sensor, based on a Paper presented at Solid-State Transducers 83, Delft, The Netherlands, May 31-Jun. 3, 1983 Royer, Holmen, Wurm, Aadland, Glenn.

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