Hysteretic MEMS thermal device and method of manufacture

Details Hysteretic MEMS thermal device and method of manufacture Hysteretic MEMS thermal device and method of manufacture

2011-05-17

2011-05-17

Budd, Mark (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Thermal or pyromagnetic

C310S309000

Reexamination Certificate

active

07944113

ABSTRACT:
A MEMS hysteretic thermal actuator may have a plurality of beams disposed over a heating element formed on the surface of the substrate. The plurality of beams may be coupled to a passive beam which is not disposed over the heating element. One of the plurality of beams may be formed in a first plane parallel to the substrate, whereas another of the plurality of beams may be formed in a second plane closer to the surface of the substrate. When the heating element is activated, it heats the plurality of beams such that they move the passive beam in a trajectory that is neither parallel to nor perpendicular to the surface of the substrate. When the beams are cooled, they may move in a different trajectory, approaching the substrate before moving laterally across it to their initial positions. By providing one electrical contact on the distal end of the passive beam and another stationary electrical contact on the substrate surface, the MEMS hysteretic actuator may form a reliable electrical switch that is relatively simple to manufacture and operate.

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