Hyperbga buildup laminate

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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C029S830000, C029S832000, C029S840000

Reexamination Certificate

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11011868

ABSTRACT:
A method and structure for forming an electronic structure that comprises a redistribution structure on a circuitized substrate. The redistribution structure includes N dielectric layers (N≧2) and N metal planes formed in the following sequence: dielectric layer1on a metallic plane that exists on a surface of the substrate, metal plane1on dielectric layer1, dielectric layer2on dielectric layer1and metal plane1, metal plane2on the dielectric layer2, . . . , dielectric layer N on dielectric layer N−1 and metal plane N−1, and metal plane N on the dielectric layer N. Metal planes or metallic planes may include signal planes, power planes, ground planes, etc. A microvia structure, which is formed through the N dielectric layers and electrically couples metal plane N to the metallic plane, includes a microvia or a portion of a microvia through each dielectric layer.

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