Abrasive tool making process – material – or composition – With inorganic material – Metal or metal oxide
Reexamination Certificate
2005-11-18
2010-02-23
Lorengo, Jerry (Department: 1793)
Abrasive tool making process, material, or composition
With inorganic material
Metal or metal oxide
C051S307000, C106S003000, C423S263000, C423S584000
Reexamination Certificate
active
07666239
ABSTRACT:
The present invention provides a method of synthesizing abrasive particles and methods of using the same in chemical mechanical polishing slurry applications. The nanosized abrasive particles according to the invention are produced by hydrothermal synthesis using an insoluble source of cerium. The crystallites of the particles include cerium ions and titanium ions.
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Feng Xiangdong
Her Yie-Shein
Yang Yi
Abu Ali Shuangyi
Ferro Corporation
Lorengo Jerry
Rankin , Hill & Clark LLP
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