Hydrostatic pressure transducer

Details Hydrostatic pressure transducer Hydrostatic pressure transducer

1991-04-26

1993-02-23

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

With pressure and/or temperature compensation

73721, 73727, 338 4, 374143, G01L 906, G01L 1904

Patent

active

051879840

ABSTRACT:
A monolithic pressure and/or temperature transducer comprises at least two sensitive semiconductor layers of III-V material sensitive to pressure and to temperature and supported by a common substrate of III-V material, which two layers comprise: a first layer doped with donor type impurities at a first concentration and having a first resistivity as a function of pressure and of temperature; and a second layer doped with donor type impurities at a second concentration different from the first concentration and having a second resistivity as a function of pressure and of temperature, which second resistivity depends on temperature in a different manner than the first resistivity.

REFERENCES:
patent: 3034345 (1962-05-01), Mason
patent: 3443167 (1969-05-01), Willardson
patent: 4554927 (1985-11-01), Fussell
patent: 4986127 (1991-01-01), Shimada et al.

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