Hydrostatic bearing and stage apparatus using same

Details Hydrostatic bearing and stage apparatus using same Hydrostatic bearing and stage apparatus using same

2007-06-19

2007-06-19

Footland, Lenard A. (Department: 3682)

Bearings

Linear bearing

Fluid bearing

Reexamination Certificate

active

10152684

ABSTRACT:
A hydrostatic bearing apparatus has a hydrostatic bearing pad, a labyrinth seal part having an exhaust groove provided around the outside of the hydrostatic bearing pad, an adjustment mechanism for adjusting a labyrinth seal part gap, non-contacting displacement gauges for sensing changes in the size of the gap, and actuators that are activated to adjust the gap so as to maintain the gap at a predetermined constant value. The exhaust groove parts and the labyrinth seal part can move relative to each other, and an annular seal forms an airtight seal to prevent air leaks and keep the bearing steady.

REFERENCES:
patent: 3407012 (1968-10-01), Siebers
patent: 4726689 (1988-02-01), Pollock
patent: 4788902 (1988-12-01), Akasaka et al.
patent: 4978233 (1990-12-01), Stötzel et al.
patent: 496 905 (1970-11-01), None
patent: 33 38 075 (1984-05-01), None
patent: 39 09 204 (1990-09-01), None
patent: 198 26 519 (1999-12-01), None
patent: 0 361 026 (1989-07-01), None
patent: 90-003793 (1990-05-01), None
patent: 1997-0045875 (1997-07-01), None
European Search Report dated Apr. 28, 2003, issued in corresponding European patent appln. No. 02 25 3615, forwarded in a communication dated May 19, 2003.
Korean Office Action dated Apr. 30, 2004, issued in a corresponding Korean patent application, No. 10-2002-0028899.
Patent Abstracts of Japan for Publication No. 09-177784, Jul. 11, 1997, which corresponds to Korean Patent Document No. 1997-0045875.

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