Hydrophobically coated pressure sensor

Measuring and testing – Fluid pressure gauge – With protective separator

Reexamination Certificate

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Reexamination Certificate

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06941814

ABSTRACT:
A pressure sensor for measuring a pressure includes a pressure chamber; and a deformation body, which can be exposed to a medium under pressure, and which, additionally, at least partially bounds the pressure chamber and seals such pressure-tightly from the medium; wherein the walls of the sensor chamber have a hydrophobic coating, which was applied by gas and/or vapor phase deposition. The hydrophobic coating preferably includes a silane. Especially suited are silanes having one or more hydrophobic groups R and one or more anchoring groups X. Especially preferred are: R—Si—X3, R1R2—Si—X2, R1R2R3—Si—X. The hydrophobic group R is preferably an alkyl, perfluoroalkyl, phenyl or perflurorophenyl group. The anchoring group X is preferably an —OH (silanol), —X (halide, e.g. —Cl), —OR (ester, e.g. —OCH3), —NH2 (amine), or —SH (Mercaptosilane). Additionally, aliphatic or cyclic silazanes —Si—NH—Si—, e.g. hexamethyldisilazane, can be used. Likewise suitable are compounds of the type Ry—Me—Xz, with Me=e.g. Zr, Ti.

REFERENCES:
patent: 5019140 (1991-05-01), Bowser et al.
patent: 6675654 (2004-01-01), Hegner et al.
patent: 3918472 (1990-12-01), None
patent: 19621996 (1997-12-01), None
patent: 19825100 (1999-12-01), None
patent: 1061351 (2000-12-01), None

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