Electricity: electrical systems and devices – Electric charging of objects or materials
Patent
1997-10-09
1998-10-13
Fleming, Fritz
Electricity: electrical systems and devices
Electric charging of objects or materials
361233, H02N 1300
Patent
active
058221700
ABSTRACT:
A touch mode electrostatic actuator and method of making the same, having first and second electrode driven surfaces positioned to move between a spaced apart relationship and a contact relationship when dielectric layer on each of the first and second electrode surfaces is subjected to a source of electrical potential to selectively actuate and discharge the dielectric layers to cause the movement between the relationships. The electrostatic actuators of this invention includes a hydrophobic layer for preventing absorption of water thereon, the hydrophobic layers being adapted to cause condensed water to form drops and prevent formation of a continuous water layer. The hydrophobic layer may be a coating on a hydrophilic actuator or, alternatively, may be made entirely from a hydrophobic material. The preferred hydrophobic material is selected from a group consisting of organic materials such as octadecyltrichlorosilane, perfluoro-decyltrichlorosilane, tetrafluoroethylene, and inorganic materials such as a diamond type carbon layer. The hydrophobic layer is electrically isolating and chemically stable in its intended environment. In the preferred embodiments, the hydrophobic material is applied to the hydrophilic dielectric layer by a method selected from dipping, plasma deposition, Langmuir-Blodgett technique, sputtering and CVD deposition.
REFERENCES:
patent: 5176358 (1993-01-01), Bonne et al.
patent: 5367429 (1994-11-01), Tsuchitani et al.
patent: 5658698 (1997-08-01), Yagi et al.
Cabuz, "Tradeoffs in MEMS Materials," SPIE vol. 2881, p. 160 (Oct. 1996).
Deng, Mehregany, Sukenik, "Performance Impact of Monolayer Coating of Polysilicon Micromotors," 0-7803-2503-6 IEEE (1995).
Maboudian and Howe, "Critical Review: Adhesion in Surface Micromechanical Structures," J. Vac. Sci. Technol. B 15(1) (Jan./Feb. 1997).
Houston, Maboudian, Howe "Assembled Monolayer Films as Durable Anti-Stiction Coatings for Polysilicon Microstructures," Solid-State Sensor and Actuator Workshop (Jun. 2-6, 1996).
Alley, Cuan, Howe, Komvopoulos, "The Effect of Release-Etch Processing on Surface Microstructure Stiction," 0-7803-0456-X/92 IEEE (1992).
Man, Gogoi, Mastrangelo, "Elimination of Post-Release Adhesion in Microstructures using Conformal Fluorocarbon Coatings", Journal of Microelectromechanical systems, vol. 6, No. 1 (Mar. 1997).
Gogoi, Mastrangelo, "Adhesion Release and Yield Enhancement of Microstructures Using Pulsed Lorentz Forces," Journal of Microelectromechanical Systems, vol. 4, No. 4 (Dec. 1995).
Deng, Collins, Mehregany, Sukenik, "Performance Impact of Monolayer Coatingof Polysilicon Micromotors" (1995).
Elders, Jansen, Elwenspoek, "Materials Analysis of Fluorocarbon Films for MEMS Applications".
Tas, Sonnenberg, Jansen, Legtenberg, Elwenspoek, "Stiction in surface micromaching," J. Micromech. Microeng. 6 (1996) no date provided by applicants.
GPI Web Client English abstract w figure of JP405308784A to Konno et al., Nov. 19, 1993.
Cabuz Cleopatra
Cabuz Eugen I.
Ohnstein Thomas R.
Fleming Fritz
Honeywell Inc.
Shudy Jr. John G.
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