Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2005-01-25
2005-01-25
Bell, Bruce F. (Department: 1746)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S270000, C204S278000, C204S282000, C204S283000, C204S292000, C205S088000, C205S148000, C205S338000, C205S350000
Reexamination Certificate
active
06846392
ABSTRACT:
A plating tool cell anode for venting unwanted gases from a fluid plating solution. In a first embodiment, the solution is introduced into a chamber, defined by the plating tool cell (10), by fluid inlet (12) and contacts the anode (50). The fluid encounters a hydrophobic membrane (14) and a hydrophilic membrane (15) spaced from the hydrophobic membrane. A driving force, such as a vacuum, is applied to the gap (16) between the membranes to remove unwanted gases therein. In a second embodiment, a single membrane is used that is both hydrophobic and hydrophilic. Preferably, the hydrophobic portion of the membrane is located at or near the perimeter of the chamber and gas to be vented is directed toward the hydrophobic portion(s).
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patent: 5112465 (1992-05-01), Danielson
patent: 5616246 (1997-04-01), Gagnon et al.
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Bell Bruce F.
Mykrolis Corporation
Nields & Lemack
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