Hydrogenation of photoresponsive semiconductor devices

Details Hydrogenation of photoresponsive semiconductor devices Hydrogenation of photoresponsive semiconductor devices

1994-06-17

1996-05-21

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 24, 437937, 437247, H01L 3118, H01L 21324

Patent

active

055189350

ABSTRACT:
Hydrogenation of an optical device that includes an intrinsic region and at least one associated doped region is effective to improve the photoresponsivity of the device. Subsequent annealing of the device substantially restores the conductivity of the doped region(s) while preserving in the intrinsic region a major part of the beneficial effects of hydrogenation.

REFERENCES:
patent: 4629514 (1986-12-01), Suda
patent: 5194398 (1993-03-01), Miyachi et al.
patent: 5248348 (1993-09-01), Miyachi et al.
patent: 5250444 (1993-10-01), Khan et al.
patent: 5275851 (1994-01-01), Fonash et al.
patent: 5282899 (1994-02-01), Balmashnov et al.
patent: 5289015 (1994-02-01), Chirovsky et al.
patent: 5336533 (1994-08-01), Balmashnov et al.
patent: 5336623 (1994-08-01), Sichanugrist et al.
patent: 5358755 (1994-10-01), Li et al.
R. H. Yan et al, IEEE Photonics Tech. Letters, vol. 1, No. 9, Sep. 1989, pp. 273-275.
J. L. Jewell et al, Electronics Letters, vol. 25, No. 17, Aug. 17, 1989, pp. 1123-1124.
S. J. Pearton et al, Hydrogen in Crystalline Semiconductors, book, 1992, pp. 50-62.

Affiliated with

Also associated with

Rating

Hydrogenation of photoresponsive semiconductor devices does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Hydrogenation of photoresponsive semiconductor devices, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Hydrogenation of photoresponsive semiconductor devices will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2037444