Hydrogenated carbon thin films

Details Hydrogenated carbon thin films Hydrogenated carbon thin films

1997-01-31

1999-08-24

Turner, Archene

Stock material or miscellaneous articles

Structurally defined web or sheet

Including components having same physical characteristic in...

428212, 428336, 428408, B32B 900

Patent

active

059423170

ABSTRACT:
The embodiments of the invention are one, two or three layer protective hydrogenated carbon (C:H) thin film coatings on a disk with hydrogenation levels that are higher at the surface and decrease from the surface downward toward the substrate. The hydrogen content of the various layers or zones of the overcoat are optimized to use the varying properties of C:H films such as good adhesion obtained with a low level of hydrogen, the high hardness of an intermediate level of hydrogen content and the low surface energy of a high hydrogen content film. In one embodiment the disk is coated with a sputtered C:H thin film with a gradient in the hydrogen concentration, with the concentration increasing toward the film surface. A second embodiment of the invention uses two layers in which the hydrogen content of bottom layer is lower than the surface layer. A third embodiment of the invention uses a three layer construction of the thin-film having a minimum hydrogenation level in the bottom layer, an intermediate hydrogenation level in the middle layer and a high hydrogenation level in the top layer.

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