Hydrogenated amorphous silicon film

Details Hydrogenated amorphous silicon film Hydrogenated amorphous silicon film

1988-10-14

1989-06-13

Edlow, Martin H.

357 30, H01L 4580

Patent

active

048397016

ABSTRACT:
A process for production of a hydrogenated amorphous silicon film of a silicon compound containing at least one element selected from the group consisting of hydrogen and halogens and having a photosensitivity of not less than 0.1 erg/cm.sup.2 at 780 nm, which comprises

REFERENCES:
patent: 4409605 (1983-10-01), Ovshinsky
patent: 4620085 (1986-10-01), Wenterling

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