Hydrogenated amorphous silicon alloys

Details Hydrogenated amorphous silicon alloys Hydrogenated amorphous silicon alloys

1991-07-12

1999-03-30

Langel, Wayne

Alloys or metallic compositions

Silicon base alloy containing metal

136258AM, 148403, 427255, 4272552, 427576, 427578, C22C 2918, C22C 1600

Patent

active

058884521

ABSTRACT:
Novel hydrogenated amorphous silicon alloys are disclosed. Hydrogenated amorphous silicon alloys produced by PECVD are disclosed. A method is also disclosed for the preparation of novel hydrogenated amorphous silicon alloys for use as thin films. The method comprises subjecting a mixed gas of gas-phase silicon compounds and other gas-phase alloy element compounds to plasma enhanced chemical vapor deposition in a reaction zone such that the alloy formed is deposited on a substrate.

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