Hydrogen separation membrane and process for producing the same

Details Hydrogen separation membrane and process for producing the same Hydrogen separation membrane and process for producing the same

1995-07-28

1998-10-27

Spitzer, Robert

Coating processes

Foraminous product produced

96 11, 427255, 4272553, B01D 7102, B05D 500

Patent

active

058275690

ABSTRACT:
A hydrogen separation membrane having a good hydrogen selective permeance and a high stability, without any deterioration, even if exposed to a high temperature atmosphere or steam, which comprises a porous ceramic membrane with SiO.sub.2 deposited and filled into pores on the surface of the membrane and a SiO.sub.2 thin film formed on the surface of the membrane as a hydrogen selectively permeable film is produced by introducing a vaporized SiO.sub.2 source into pores on the surface of a porous ceramic membrane by suction established by providing a pressure difference between both sides of the membrane and thermally decomposing the SiO.sub.2 source, thereby forming, depositing and filling SiO.sub.2 into the pores and fully coating the outer surface of the membrane with a SiO.sub.2 thin film simultaneously where the SiO.sub.2 source is preferably a tetra(lower alkoxy)silane and the deposition of the SiO.sub.2 source is preferably carried out by a chemical vapor deposition process.

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