Hydrogen charged thin film conductor

Details Hydrogen charged thin film conductor Hydrogen charged thin film conductor

1985-02-27

1986-04-29

Smith, John D.

Coating processes

Electrical product produced

Condenser or capacitor

427 91, 427 99, B05D 512

Patent

active

045856729

ABSTRACT:
A thin film stripe that includes a conductive metal alloyed with at least one other element capable of chemically bonding with hydrogen and a compound formed by hydrogen chemically bonded with at least one other element in sufficient amounts to increase the stripe's resistance to electromigration failure at normal operating temperatures and pressures.

REFERENCES:
patent: 4017890 (1977-04-01), Howard et al.
patent: 4460618 (1984-07-01), Heinecke et al.
Donald E. Meyer, "Effects of Hydrogen Incorporation in Some Deposited Metallic Thin Films," J. Vac. Sci. Tech. 17(1), Jan./Feb. 1980, pp. 322-326.
Shih et al, "The Effect of Hydrogen on the Rate of Formation of Intermetallics in the Cu-Sn, Ag-Sn and Ni-Sn Systems", IEEE International Reliability Phys. Sympos., pp. 87-90 (1979).

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