Hydrodynamic radial flux polishing and grinding tool for...

Abrading – Precision device or process - or with condition responsive... – Condition responsive control for sandblasting

Reexamination Certificate

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C451S038000

Reexamination Certificate

active

11327786

ABSTRACT:
A polishing tool useful for grinding and high precision, fine polishing of flat or curved optical surfaces, as well as for the optical flattening of semiconductor and metallic surfaces. The tool does not make contact with the surface to be polished and lacks moving parts; but produces a high velocity flux “cushion” that expands radially and parallel to the working surface, generating a stable, uniform and repeatable annular abrasion footprint. Due to the hydrodynamic characteristics of the tool, it can create polished surfaces of high-precision optical quality starting from the grinding process up through the final fine polishing process without having to change the tool, thereby avoiding friction against the work surface and tool wear. It can polish thin membranes and does not require a rigid or active support for the working surface. This invention considerably simplifies optical polishing processes and reduces costs with respect to other known methods.

REFERENCES:
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patent: 5969368 (1999-10-01), Thompson
patent: 5971824 (1999-10-01), Cho
patent: 6106380 (2000-08-01), Jacobs
patent: 6354923 (2002-03-01), Lankford
patent: 101 13 599 (2002-02-01), None
Booij, S.M. et al., “Nanometer Deep Shaping with Fluid Jet Polishing,” Delft University of Technology, s.m.booij@tnw.tudelft.nl.
Fahnle, Oliver W. et al., “Fluid Jet Polishing of Optical Surfaces,” Applied Options, vol. 37, No. 28, Oct. 1, 1998, pp. 6771-6773.
Fahnle, Oliver W. et al., “Finishing of Optical materials Using Fluid Jet Polishing,”, DeCos, Delft Center for Optical Surfaces, TNO Institute of applied Physics, The Netherlands—oliver.faehnle@fisba.ch.
Booij, Silvia M. et al, “Jules Verne- a New Polishing Technique Related to FJP,” Optics Research Group, Delft Univ. of Technology, The Netherlands s.m.booij@tnw.tudelft.nl.
E. Sohn et al., “HyDra: a novel hydrodynamic polishing tool for high quality optical surfaces,” Astronomy Institute, National Astronomical Observatory, UNAM, Mexico, D.F., Mexico, sohn@astroscu.unam.mx, 3 pages.
E. Sohn et al., “Hydra: a novel hydrodynamic polishing tool for high quality optical surfaces,” Astronomy Institute, National Astronomical Obsevatory, UNAM, Mexico, D.F. Mexico, sohn@astroscu.unam.mx, 3 pages (a variation).
Jorge Gonzalez-Garcia et al., “Static dynamic removal rates of a new hydrodynamic polishing tool,” Applied Optics, vol. 43, No. 18, Jun. 20, 2004, pp. 3623-3631.
E. Ruiz et al., “New Perspectives in Hydrodynamic Radial Polishing Techniques for Optical Surfaces,” Astronomy Institute, National Astronomical Observatory, UNAM, Mexico D.F., Mexico, elfego@astroscu.unam.mx.

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