Hydrodynamic bearing apparatus and stage apparatus using the...

Details Hydrodynamic bearing apparatus and stage apparatus using the... Hydrodynamic bearing apparatus and stage apparatus using the...

2006-12-05

2006-12-05

Hannon, Thomas R. (Department: 3682)

Bearings

Linear bearing

Fluid bearing

C384S010000

Reexamination Certificate

active

07144160

ABSTRACT:
A plurality of preload magnet units are arranged on each side of a hydrodynamic bearing symmetrically. Preload magnet units are arranged inside a labyrinth partition to surround the hydrodynamic bearing in a non-air atmosphere.

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European Search Report dated Jan. 12, 2006, issued in corresponding European patent application No. EP 04 25 6311, forwarded in a Communication dated Feb. 3, 2006.

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