Work holders – Holder mounted for movement – With plural means for changing holder positions
Patent
1981-10-02
1984-07-31
Schmidt, Frederick R.
Work holders
Holder mounted for movement
With plural means for changing holder positions
2504421, 92165PR, 108137, B23Q 318
Patent
active
044625804
ABSTRACT:
A hydraulically driven X-Y stage for use primarily in optical pattern generators, especially those requiring a vacuum. A pair of hydraulic cylinders (10 and 20) provide the motion along the step and slew axes. The cylinders can be constructed so that either the rod (11 and 21) or the outer carriage (12 and 22) moves due to the oil pressure differential. Hydraulic bearings (36) between the rod and carriage prevent sliding friction while providing stiffness to linear motion in undesired directions. The rods have areas designed, in combination with the bearings, to prevent rotational motion. Hollow tubes and chambers (14, 15, 41-44, and 24) are provided for feeding oil to the cylinders, and flexible metal bellows (19, 34, and 35) surround the cylinders and keep the oil contained.
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Philips Technical Review, vol. 30, 1969, No. 5, "A Precision Lathe with Hydrostatic Bearings and Drive," by Kraakman et al., pp. 117-133.
IBM Technical Disclosure Bulletin, vol. 19, No. 2, Jul. 1976, "High Thruput Multiwafer Disc Scanner for Ion Implantation", by Balderes et al., pp. 491-492.
J. Phys. E: Sci. Instrum., vol. 16, No. 3, Mar. 1983, "A Position-Controlled Rectangular-Coordinate Table", by Garside et al., pp. 223-226.
Philips Technical Review, vol. 34, 1974, "The Opthycograph", by A. G. Bouwer et al., pp. 257-270.
AT&T Bell Laboratories
Birnbaum Lester H.
Schad Steven P.
Schmidt Frederick R.
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