Photocopying – Contact printing – Fluid pressure retention of carrier and receiver in exposure...
Reexamination Certificate
2006-10-10
2010-11-09
Kim, Peter B (Department: 2882)
Photocopying
Contact printing
Fluid pressure retention of carrier and receiver in exposure...
C355S072000, C355S073000, C355S075000, C355S076000, C355S078000
Reexamination Certificate
active
07830498
ABSTRACT:
A contact lithography apparatus, system and method use a hydraulic deformation to facilitate pattern transfer. The apparatus, system and method include a spacer that provides a spaced apart proximal orientation of lithographic elements, and a hydraulic force member that provides the hydraulic deformation. One or more of the lithographic elements and the spacer is deformable, such that hydraulic deformation thereof facilitates the pattern transfer.
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Gao Jun
Picciotto Carl
Wu Wei
Hewlett--Packard Development Company, L.P.
Kim Peter B
Riddle Christina
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