Hybrid type integrated optical device having double-layered subs

Details Hybrid type integrated optical device having double-layered subs Hybrid type integrated optical device having double-layered subs

1994-07-15

1997-03-11

Monin, Jr., Donald L.

Optical waveguides

Integrated optical circuit

385 35, 385 88, 257432, H01L 2713, G02B 610

Patent

active

056110065

ABSTRACT:
An integrated optical device including: a composite substrate (1, 6) having a support substrate (1) and a laminated upper layer (6) formed on the support substrate, the upper layer having a preselected height and being capable of being selectively etched; a recess formed in the upper layer; a positioning hole (7, 8) formed in a surface portion of the support substrate exposed in the recess; a first optical component disposed on the surface of the upper layer; a second optical component guided by a portion of the recess and mounted on the surface of the support substrate; and a third optical component disposed in the positioning hole. Components having different height can be easily aligned on an optical axis.

REFERENCES:
patent: 4875750 (1989-10-01), Spaeth et al.
patent: 5016965 (1991-05-01), Marshall et al.
patent: 5064266 (1991-11-01), San et al.
patent: 5321786 (1994-06-01), Valette et al.
Patent Abstracts of Japan, vol. 7, No. 18 (P-170), Jan. 25, 1983 & JP-A-57 172308 (Tateishi Denki KK), Oct. 23, 1982.

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