Hybrid two-dimensional surface-emitting laser arrays

Details Hybrid two-dimensional surface-emitting laser arrays Hybrid two-dimensional surface-emitting laser arrays

1988-08-26

1989-11-14

Sikes, William L.

Coherent light generators

Particular active media

Semiconductor

372 34, 372 45, 372 48, 372 97, H01S 319

Patent

active

048812374

ABSTRACT:
Two-dimensional surface-emitting diode laser arrays are described that take advantage of both the advanced state of development of linear laser arrays with conventional cleaved end faces and the rapid development of Si heat sink technology. A hybrid array consists of linear arrays of edge-emitting lasers that are mounted in grooves with flat bottoms and 45.degree. sidewalls etched in the top of a Si substrate containing microchannels for fluid flow on the backside. The 45.degree. sidewalls of the top Si grooves are coated with a highly reflecting metallic layer. These 45.degree. mirrors deflect the laser emission from the cleaved end faces of the linear laser arrays by 90.degree. so the emission is normal to the array surface. Use of the integral microchannel heat sink in the bottom of the Si substrate provides excellent heat removal capabilities for high power density operation.

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