Rotary kinetic fluid motors or pumps – With means for re-entry of working fluid to blade set – Turbine regenerative pump
Reexamination Certificate
2005-05-12
2008-11-04
Kershteyn, Igor (Department: 3745)
Rotary kinetic fluid motors or pumps
With means for re-entry of working fluid to blade set
Turbine regenerative pump
C415S055600, C415S090000, C415S143000
Reexamination Certificate
active
07445422
ABSTRACT:
A hybrid turbomolecular vacuum pump includes a housing having an inlet port and an exhaust port, one or more axial flow stages located within the housing, each of the axial flow stages including a stator and an impeller, each having inclined blades, at least one additional vacuum pumping stage which is not an axial flow stage, the additional vacuum pumping stage being located within the housing and including a stator and an impeller, and a motor to rotate the impellers such that gas is pumped from the inlet port to the exhaust port. The vacuum pump does not include a molecular drag stage having a rotating cylindrical drum or a rotating disk with a flat pumping surface. The additional vacuum pumping stage may be a modified molecular drag stage, wherein the impeller includes a disk having a roughened or grooved pumping surface, and/or a regenerative stage.
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patent: 6607351 (2003-08-01), Hablanian
Fishman Bella
Kershteyn Igor
Varian Inc.
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