Hybrid system having a non-MEMS device and a MEMS device

Details Hybrid system having a non-MEMS device and a MEMS device Hybrid system having a non-MEMS device and a MEMS device

2011-01-25

2011-01-25

Pascal, Robert (Department: 2817)

Oscillators

Solid state active element oscillator

Transistors

C331S154000, C331S158000

Reexamination Certificate

active

07876167

ABSTRACT:
A hybrid system having a non-MEMS device and a MEMS device is described. The apparatus includes a non-MEMS device and an integrated circuit including a MEMS device, the integrated circuit formed on a substrate. The integrated circuit includes a control circuit for the non-MEMS device and a MEMS control circuit for the MEMS device.

REFERENCES:
patent: 7106143 (2006-09-01), Bloch et al.
patent: 7211926 (2007-05-01), Quevy et al.

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