Hybrid substrate and method for fabricating the same

Details Hybrid substrate and method for fabricating the same Hybrid substrate and method for fabricating the same

2007-02-13

2007-02-13

Coleman, W. David (Department: 2823)

Semiconductor device manufacturing: process

Bonding of plural semiconductor substrates

Having enclosed cavity

C257SE21122

Reexamination Certificate

active

11202834

ABSTRACT:
A hybrid substrate, i.e., a substrate fabricated from different materials, and method for fabricating the same are presented. The hybrid substrate is configured for fabricating more than two different devices thereon, has a high thermal conductivity, and is configured for patterning interconnects thereon for interconnecting the different devices fabricated on the hybrid substrate.

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