Hybrid sensor

Details Hybrid sensor Hybrid sensor

1995-03-23

1998-07-28

Evans, Geoffrey S.

Electrical resistors

Resistance value responsive to a condition

Plural conditions

338 13, 338 25, 338 43, 7350403, H01C 700

Patent

active

057867445

ABSTRACT:
A hybrid sensor which is comprised of an acceleration sensor for detecting acceleration based on a temperature distribution of a predetermined gas hermetically enclosed within a fluid-tight space, and an angular velocity sensor for detecting angular velocity based on a deviation of a flow of a predetermined gas. The acceleration sensor and the angular velocity sensor are formed in one piece by the use of semiconductor processing technology in such a manner that the acceleration sensor and the angular velocity sensor are formed on a plurality of semiconductor substrates, and then the plurality of semiconductor substrates are superposed one upon another and united into a laminate.

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