Hybrid plasma element monitor

Details Hybrid plasma element monitor Hybrid plasma element monitor

2006-08-31

2008-11-18

Evans, F. L. (Department: 2877)

Optics: measuring and testing

By dispersed light spectroscopy

With sample excitation

Reexamination Certificate

active

07453566

ABSTRACT:
Hybrid plasma monitor. A ground electrode is spaced apart from a high voltage electrode supporting an electric discharge therebetween to generate a plasma. The ground electrode and the high voltage electrode form an annular region into which a sample is introduced for generating a plasma. Microwave radiation couples into the plasma to sustain the plasma. A light detector such as a spectrometer receives light resulting from atomic emissions from the sample to analyze elements in the sample.

REFERENCES:
patent: 5905571 (1999-05-01), Butler et al.
patent: 5909277 (1999-06-01), Woskov et al.
patent: 6429935 (2002-08-01), Duan
patent: 6594010 (2003-07-01), Malczewski et al.
patent: 2006/0119278 (2006-06-01), Kaneko et al.

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