Hybrid optical multi-axis beam steering apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With means to direct electron beam or ion beam to a gas to...

Reexamination Certificate

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Details

C385S018000, C250S492200, C359S238000

Reexamination Certificate

active

10223078

ABSTRACT:
An apparatus for precisely steering a beam of light by making use of a hybrid inter optical alignment that occurs when a beam steering mechanism is micro-machined with respect to a crystallographic orientation of a substrate.

REFERENCES:
patent: 5872880 (1999-02-01), Maynard
patent: 6137926 (2000-10-01), Maynard
patent: 000650133 (1994-09-01), None
patent: 07146447 (1995-06-01), None

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