Hybrid optical multi-axis beam steering apparatus

Details Hybrid optical multi-axis beam steering apparatus Hybrid optical multi-axis beam steering apparatus

1998-11-13

2000-07-11

Gulakowski, Randy

Etching a substrate: processes

Forming or treating optical article

216 41, 385 92, 359159, 430321, B29D 1100

Patent

active

060867760

ABSTRACT:
A method for making the alignment means of an optical apparatus. The apparatus comprising a substrate defining one or more aligned cavities, a primary optical path for accommodating the passage of a light beam, and an upper cavity in the substrate which is aligned to a predetermined degree of precision and in direct communication with the primary optical path. The beam steering means directs the beam. The hybrid inter-optical alignment precision occurring when a beam steering mechanism is micromachined with respect to a crystallographic orientation of the substrate is used for precise beam steering.

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patent: 5504614 (1996-04-01), Webb et al.
patent: 5909280 (1999-06-01), Zavracky

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