Hybrid optical integration assembly using optical platform

Details Hybrid optical integration assembly using optical platform Hybrid optical integration assembly using optical platform

1996-08-29

1998-07-14

Tran, Minh-Loan

Active solid-state devices (e.g., transistors, solid-state diode

Incoherent light emitter structure

In combination with or also constituting light responsive...

257 84, 257 98, 257 99, 385 83, 385 92, H01L 2715

Patent

active

057808759

ABSTRACT:
An optical assembly structure includes, a semiconductor element generating a large amount of heat and a high impedance optical element which are to be mounted, with low optical loss on the same semiconductor substrate which has an optical waveguide formed thereon.The element generating a large amount of heat is mounted on a terrace of the semiconductor substrate directly or through an insulating layer having a thickness of submicron order, while the high impedance element is mounted in a groove which is etched into the semiconductor substrate to such an extent that the optical axis of the high impedance element mates with the optical axis of the optical waveguide layer formed on a recess in the semiconductor substrate. The optical axes can be adjusted independently for the respective elements. Alternatively, with a potential on the semiconductor substrate set equal to a supply voltage or a ground potential, a crystal substrate for a forward biased heat generating element is given the polarity opposite to that of a crystal substrate for a reverse biased element which may imply a problem of stray capacitance.

REFERENCES:
patent: 5345524 (1994-09-01), Lebby et al.
patent: 5391869 (1995-02-01), Ade et al.
Electronics letters, "Optoelectronic Hybrid Integrated Laser Diode Module Using Planar Lightwave Circuit Platform", by S. Mino, et al., vol. 30, No. 22, Oct. 27, 1994.
"Alignment-free Photodetector-Single-Mode Fiber Coupling Using a Planarized Si Platform", 5.sup.th Optoelectronic Conference Technical Digest, Jul. 1994, Tabuchi et al.
"Silica-on-Terraced-Silicon Platform for Optical Hybrid Integration" Yamada et al., 5.sup.th Optoelectronic Conference Technical Digest, Jul. 1994.
"A Hybrid Integrated Optical WDM Transmitter/Receiver Module for Optical Subscriber Systems Utilizing a Planar Lightwave Circuit Platform", Y. Yamada et al, Optical-Fiber Communication Conference in 1995, pp. PD12-1 to PD12-5, 1995.

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