Hybrid multiple quantum well spatial light modulator

Details Hybrid multiple quantum well spatial light modulator Hybrid multiple quantum well spatial light modulator

1989-10-10

1995-05-02

Nelson, Peter A.

Fishing, trapping, and vermin destroying

437 5, 385 27, H01L 3118

Patent

active

054118956

ABSTRACT:
A method for fabricating a hybrid MQW spatial light modulator is described which comprises steps of depositing on a substrate in sequence a first layer to preselected thickness of n+ (or p+) semiconductor material, a second layer to preselected thickness of intrinsic semiconductor material and a third layer to preselected thickness of p+ (or n+) semiconductor material to form a modulator portion, applying a metallic layer defining a mirrored surface to the third layer of the modulator portion, providing a prefabricated silicon PIN detector having a layered structure including an intrinsic layer of preselected thickness sandwiched between an n+ layer and p+ layer of respective preselected thicknesses and joining the PIN detector to the mirrored surface using a conductive adhesive layer, selectively boring channels into the modulator portion to preselected depth into the PIN detector to form an array of a plurality of pixels on the modulator portion, filling the channels with light blocking material, and applying electrodes to the PIN detector and modulator portion.

REFERENCES:
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patent: 4642413 (1987-02-01), Ovshinsky
patent: 4685763 (1987-08-01), Tada et al.
patent: 4696533 (1987-09-01), Kingston et al.
patent: 4713493 (1987-12-01), Ovshinsky
patent: 4737003 (1988-04-01), Matsumura et al.
patent: 4904045 (1990-02-01), Alferness et al.

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