Hybrid multibeam electronic emission device with controlled...

Details Hybrid multibeam electronic emission device with controlled... Hybrid multibeam electronic emission device with controlled...

2004-12-29

2010-11-23

Souw, Bernard E (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S492300

Reexamination Certificate

active

07838839

ABSTRACT:
An electronic emission device including plural electron beams including a first structure having a plurality of emission sources of electron beam, hybridized with a second structure including a plurality of diaphragm openings.

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