Coherent light generators – Particular active media – Semiconductor
Patent
1996-04-23
1998-02-17
Bovernick, Rodney B.
Coherent light generators
Particular active media
Semiconductor
372 96, 438 22, H01S 319, H01S 308, H01L 2120
Patent
active
057198926
ABSTRACT:
A hybrid mirror structure for a visible emitting VCSEL including a first distributed Bragg reflector disposed on a substrate and including first pairs of alternating layers including an oxidized aluminum material and second pairs of alternating layers. A first cladding region disposed on the first distributed Bragg reflector, an active region disposed on the first cladding region, and a second cladding region disposed on the active region, and a second distributed Bragg reflector disposed on the second cladding region. In the first distributed Bragg reflector, each pair of alternating layers includes a layer containing oxidized aluminum. Alternate layers contain AlAs which is oxidized to decrease the index of refraction to a range of approximately 1.3 to 1.7.
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Jiang Wenbin
Kiely Philip
Lebby Michael S.
Bovernick Rodney B.
Motorola Inc.
Parsons Eugene A.
Phan Luong-Quyen T.
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