Hybrid metal/metal oxide electrodes for ferroelectric capacitors

Details Hybrid metal/metal oxide electrodes for ferroelectric capacitors Hybrid metal/metal oxide electrodes for ferroelectric capacitors

1994-12-29

1996-09-10

Picard, Leo P.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

3613011, 3613014, 361313, 3613212, 3613063, 361311, 3612983, 257295, 257303, 257306, 257310, 437 51, 437 52, 437 57, 437 60, H01G 4008, H01G 410

Patent

active

055554865

ABSTRACT:
Ferroelectric capacitors with hybrid electrodes including both a conducting oxide and a noble metal may be used to achieve devices having improved performance over capacitors with either platinum or ruthenium oxide electrodes. These hybrid electrode structures can improve capacitor performance both in terms of fatigue and leakage current. Accordingly, these ferroelectric capacitors with hybrid electrodes can be used as elements of an integrated circuit such as a non-volatile memory or dynamic random access memory.

REFERENCES:
patent: 5142437 (1992-08-01), Kammerdiner et al.
patent: 5218512 (1993-06-01), Nakamura
patent: 5262920 (1993-11-01), Sakuma et al.
patent: 5270298 (1993-12-01), Ramesh

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