Hybrid heater with ceramic foil serrated plate and gas assist

Details Hybrid heater with ceramic foil serrated plate and gas assist Hybrid heater with ceramic foil serrated plate and gas assist

1999-03-29

2000-04-25

Paschall, Mark

Electric heating

Heating devices

With power supply and voltage or current regulation or...

219483, 21912143, 438660, 438663, 118725, H05B 102

Patent

active

060546883

ABSTRACT:
A substrate heating apparatus having a chamber, a device for adding gas into the chamber and a substrate heater is provided. The substrate heater is located within the chamber and includes a first plate having a bottom surface. The bottom surface of the first plate has at least one groove. The at least one groove forms at least two thermal zones on the first plate. The substrate heater further includes a heater element and a second plate. The heater element is located between the bottom surface of the first plate and the second plate and thus enables heating of the substrate by radiation and gas conduction.

REFERENCES:
patent: 4715921 (1987-12-01), Maher et al.
patent: 4903754 (1990-02-01), Hirscher et al.
patent: 4919614 (1990-04-01), Kitagawa et al.
patent: 5013385 (1991-05-01), Maher et al.
patent: 5588827 (1996-12-01), Muka
patent: 5688331 (1997-11-01), Aruga et al.
patent: 5892207 (1999-04-01), Kawamura et al.
patent: 5911896 (1999-06-01), Holden et al.

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