Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2006-03-21
2006-03-21
Hollington, Jermela (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S763010, C324S1540PB
Reexamination Certificate
active
07015715
ABSTRACT:
Systems and methods are disclosed for measuring a distance (or gap) between substrates of a hybrid semiconductor. The measurements may be made during a hybridization process to, for example, provide alignment feedback during the hybridization process. The measurements may also be made after the hybridization process to further calibrate the process or to provide information useful for further processing operations.
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Aziz Naseem Y.
Barton Jeffrey B.
Costello Adrienne N.
Parrish William J.
Hollington Jermela
Indigo Systems Corporation
MacPherson Kwok & Chen & Heid LLP
Michelson Greg J.
Nguyen Jimmy
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