Hybrid confocal microscopy

Details Hybrid confocal microscopy Hybrid confocal microscopy

1997-04-09

1999-03-09

Kim, Robert

Optics: measuring and testing

By polarized light examination

With light attenuation

356379, G01B 1124, G01B 1128

Patent

active

058808442

ABSTRACT:
A method and apparatus are provided that measure object height and volume using a combination of and optical means and image processing techniques. The method includes multiple imaging paths with different object distance viewing the same field of view of the object. Image processing techniques are used to determine the degrees-of-focus of features of the images captured from the different imaging paths. Height of the features of the object is determined by the difference in the degrees-of-focus on different images. The object volume is calculated from the height of its features.

REFERENCES:
patent: 4743771 (1988-05-01), Sacks et al.
patent: 4891772 (1990-01-01), Case et al.
patent: 4965441 (1990-10-01), Picard

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