Humidity sensor with multiple electrode layers separated by a po

Details Humidity sensor with multiple electrode layers separated by a po Humidity sensor with multiple electrode layers separated by a po

1976-05-13

1977-04-12

Albritton, C. L.

Electrical resistors

Resistance value responsive to a condition

Gas, vapor, or moisture absorbing or collecting

338325, H01L 700

Patent

active

040178200

ABSTRACT:
The invention concerns a humidity or moisture sensor, with a relatively thick sensitive monolithic ceramic volume. The sensitive volume is defined by a porous ceramic material with multiple electrodes buried therein in parallel planes which extend substantially entirely across two dimensions of the structure. Moisture entering the porous crystalline matrix is subjected to a high electric field giving rise to a current which is a function of the ambient moisture. By virtue of the inert ceramic surface and the buried precious metal electrodes, the device is sensitive, fast, yet electrically, chemically, thermally and mechanically stable.

REFERENCES:
patent: 3255324 (1966-06-01), Ovshinsky
patent: 3916367 (1975-10-01), Nicholas et al.

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