Humidity sensor with electrical rejection of contaminants

Details Humidity sensor with electrical rejection of contaminants Humidity sensor with electrical rejection of contaminants

1981-05-15

1982-10-26

Serwin, Ronald E.

Chemical apparatus and process disinfecting, deodorizing, preser

Analyzer, structured indicator, or manipulative laboratory...

Means for analyzing gas sample

23232E, 733365, 427103, 338 35, G01R 2702, H01L 700

Patent

active

043561500

ABSTRACT:
A conductivity type thin film humidity sensor on a silicon chip which sensor includes structure which electrically shields the sensing area from highly dissociative contaminants.

REFERENCES:
patent: 3864659 (1975-02-01), Furuuchi et al.
patent: 3961301 (1976-06-01), Fraioli
patent: 4015230 (1977-03-01), Nitta et al.
patent: 4080564 (1978-03-01), Nitta et al.
patent: 4143177 (1979-03-01), Kovac et al.
patent: 4203087 (1980-05-01), Kovac et al.
patent: 4280115 (1981-07-01), Farrington
patent: 4321577 (1982-03-01), Carlson

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