Humidity sensor of capacitance change type

Details Humidity sensor of capacitance change type Humidity sensor of capacitance change type

1978-06-05

1980-08-12

Goldberg, Elliot A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

733365, 361322, H01G 700

Patent

active

042176239

ABSTRACT:
A device comprising a metal substrate serving as a first electrode, a dielectric oxide film formed by oxidation of a surface region of the substrate and a second electrode layer formed porously on the dielectric oxide film. Microscopically, the second electrode layer is only partially in contact with the dielectric oxide film. Accordingly moisture adsorbed through the second electrode layer covers uncoated regions of the dielectric film surface to a variable extent in dependence on humidity, resulting in a change in the electrostatic capacitance across the electrodes. Preferably the device comprises a semiconducting metal oxide layer as an innermost part of the second electrode layer.

REFERENCES:
patent: 2836776 (1958-05-01), Ishikawa
patent: 3022667 (1962-02-01), Wexler
patent: 3083573 (1963-04-01), Shaw
patent: 3166693 (1965-01-01), Haring
patent: 3254390 (1966-06-01), Shtasel
patent: 3523244 (1970-08-01), Goodman
patent: 3987676 (1976-10-01), Bennewitz
Sharp Tubular Thin Film Capalitors Tech. Digest #3, p. 41.

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