Humidity sensor, material therefor and method

Coating processes – Electrical product produced – Metal coating

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Details

252514, 252519, 338 35, 427126, 427287, 427380, 427383B, B05D 512

Patent

active

040163083

ABSTRACT:
A novel humidity sensor printed and fired on a dielectric substrate comprising an interdigitated pattern of a conductive precious metal with cobalt oxide as the only binder. Sensors according to the invention may be employed as hermeticity detectors in semiconductor packages.

REFERENCES:
patent: 3380835 (1968-04-01), Short
patent: 3408311 (1968-10-01), Short
patent: 3444501 (1969-05-01), Delaney et al.
patent: 3553109 (1971-01-01), Hoffman
patent: 3784887 (1974-01-01), Sheard
patent: 3823093 (1974-07-01), Amin
patent: 3838071 (1974-09-01), Amin

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