Humidity sensor, material therefor and method

Details Humidity sensor, material therefor and method Humidity sensor, material therefor and method

1976-12-02

1977-09-20

Albritton, C. L.

Electrical resistors

Resistance value responsive to a condition

Gas, vapor, or moisture absorbing or collecting

23254E, 29610R, 29621, 200 6106, 252513, 252514, 252519, 357 75, 427126, H01L 700

Patent

active

040500489

ABSTRACT:
A novel humidity sensor printed and fired on a dielectric substrate comprising an interdigitated pattern of a conductive precious metal with cobalt oxide as the only binder. Sensors according to the invention may be employed as hermeticity detectors in semiconductor packages.

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patent: 3380835 (1968-04-01), Short
patent: 3408311 (1968-10-01), Short
patent: 3553109 (1971-01-01), Hoffman
patent: 3823093 (1974-07-01), Amin
patent: 3838071 (1974-09-01), Amin
patent: 3890703 (1975-06-01), Frazee et al.
patent: 3906426 (1975-09-01), Frazee et al.
patent: 3943557 (1976-03-01), Frazee et al.
patent: 3961301 (1976-06-01), Fraioli

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